V. N. Bliznetsov

Publication Activity (10 Years)

Years Active: 2003-2005
Publications (10 Years): 0

Publications

H. Y. Li, Y. J. Su, C. F. Tsang, S. M. Sohan, V. N. Bliznetsov, L. Zhang
) dual damascene interconnection. Microelectron. Reliab. 45 (7-8) (2005)
C. F. Tsang, V. N. Bliznetsov, Y. J. Su
Study and improvement of electrical performance of 130 nm Cu/CVD low k SiOCH interconnect related to via etch process. Microelectron. J. 34 (11) (2003)