Sohan Singh Mehta

Publication Activity (10 Years)

Years Active: 2003-2004
Publications (10 Years): 0

Publications

Sohan Singh Mehta, Sun Hai Qin, Moitreyee Mukherjee-Roy, Navab Singh, Rakesh Kumar
Resist pattern peeling assessment in DUV chemically amplified resist. Microelectron. J. 35 (5) (2004)
Sohan Singh Mehta, Navab Singh, Moitreyee Mukherjee-Roy, Rakesh Kumar
Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning. Microelectron. J. 35 (7) (2004)
Moitreyee Mukherjee-Roy, Navab Singh, Sohan Singh Mehta, G. S. Samudra
A new approach for eliminating unwanted patterns in attenuated phase shift masks. Microelectron. J. 34 (10) (2003)
Navab Singh, Moitreyee Mukherjee-Roy, Sohan Singh Mehta
Defocusing image to pattern contact holes using attenuated phase shift masks. Microelectron. J. 34 (4) (2003)