Login / Signup
A new approach for eliminating unwanted patterns in attenuated phase shift masks.
Moitreyee Mukherjee-Roy
Navab Singh
Sohan Singh Mehta
G. S. Samudra
Published in:
Microelectron. J. (2003)
Keyphrases
</>
phase shift
pattern analysis
edge detection
data sets
pattern discovery
databases
neural network
artificial intelligence
data streams
artificial neural networks
knowledge discovery
pattern mining
temporal patterns
previously unknown