Login / Signup

Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning.

Sohan Singh MehtaNavab SinghMoitreyee Mukherjee-RoyRakesh Kumar
Published in: Microelectron. J. (2004)
Keyphrases
  • phase shift
  • integrated circuit
  • database systems
  • evolutionary algorithm
  • waveguide
  • binary classifiers
  • refractive index
  • scan data