Defocusing image to pattern contact holes using attenuated phase shift masks.

Navab Singh Moitreyee Mukherjee-Roy Sohan Singh Mehta

Published in: Microelectron. J. (2003)

Keyphrases

phase shift
image data
image analysis
edge detection
multiscale
input image
template matching
low level
single image
image representation
feature points
image collections
image content
keypoints
segmentation method
image classification
image features
high resolution
image retrieval
image segmentation
similarity measure
image regions
pixel values
markov random field
image pixels
bounding box