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Siew Chee Phang
Publication Activity (10 Years)
Years Active: 2019-2021
Publications (10 Years): 3
Top Topics
Open Issues
Semiconductor Manufacturing
Plasma Etching
Discrete Event Simulation
Top Venues
IEEE Access
Comput. Intell. Neurosci.
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Publications
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Tze Chiang Tin
,
Saw Chin Tan
,
Hing Yong
,
Jimmy Ook Hyun Kim
,
Eric Ken Yong Teo
,
Ching Kwang Lee
,
Peter Than
,
Angela Pei San Tan
,
Siew Chee Phang
A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective.
IEEE Access
9 (2021)
Tze Chiang Tin
,
Saw Chin Tan
,
Hing Yong
,
Jimmy Ook Hyun Kim
,
Eric Ken Yong Teo
,
Joanne Ching Yee Wong
,
Ching Kwang Lee
,
Peter Than
,
Angela Pei San Tan
,
Siew Chee Phang
The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing.
IEEE Access
9 (2021)
Tze Chiang Tin
,
Kang-Leng Chiew
,
Siew Chee Phang
,
San-Nah Sze
,
Pei San Tan
Incoming Work-In-Progress Prediction in Semiconductor Fabrication Foundry Using Long Short-Term Memory.
Comput. Intell. Neurosci.
2019 (2019)