Incoming Work-In-Progress Prediction in Semiconductor Fabrication Foundry Using Long Short-Term Memory.
Tze Chiang TinKang-Leng ChiewSiew Chee PhangSan-Nah SzePei San TanPublished in: Comput. Intell. Neurosci. (2019)
Keyphrases
- prediction accuracy
- recurrent neural networks
- semiconductor devices
- prediction algorithm
- long short term memory
- plasma etching
- prediction model
- machine learning
- high density
- learning algorithm
- integrated circuit
- prediction error
- data sets
- high speed
- information technology
- data streams
- search algorithm
- decision trees
- data mining
- real world
- neural network