The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing.
Tze Chiang TinSaw Chin TanHing YongJimmy Ook Hyun KimEric Ken Yong TeoJoanne Ching Yee WongChing Kwang LeePeter ThanAngela Pei San TanSiew Chee PhangPublished in: IEEE Access (2021)