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Shin Ishimatsu
Publication Activity (10 Years)
Years Active: 2020-2020
Publications (10 Years): 1
2025
2016
Top Topics
2025
2016
High Density
2025
2016
Scanning Electron Microscope
2025
2016
Gate Insulator
Top Venues
IEICE Trans. Electron.
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Publications
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Shun'ichiro Ohmi
,
Shin Ishimatsu
,
Yuske Horiuchi
,
Sohya Kudoh
-Plasma Nitridation for High-k HfN Gate Insulator Formed by Electron Cyclotron Resonance Plasma Sputtering.
IEICE Trans. Electron.
(6) (2020)