S. Orain

Publication Activity (10 Years)

Years Active: 2007-2007
Publications (10 Years): 0

Publications

S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen
FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectron. Reliab. 47 (2-3) (2007)
Florian Cacho, S. Orain, G. Cailletaud, H. Jaouen
A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies. Microelectron. Reliab. 47 (2-3) (2007)