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A constitutive single crystal model for the silicon mechanical behavior: Applications to the stress induced by silicided lines and STI in MOS technologies.
Florian Cacho
S. Orain
G. Cailletaud
H. Jaouen
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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theoretical framework
statistical model
mathematical model
prior knowledge
probabilistic model
data mining
high level
real time
computational model
probability distribution
conceptual model
hough transform
em algorithm
management system
objective function
decision trees
genetic algorithm
neural network