FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding.
S. OrainJ.-C. BarbéX. FederspielP. LegalloH. JaouenPublished in: Microelectron. Reliab. (2007)
Keyphrases
- detection method
- diffusion process
- optimization process
- high accuracy
- computational complexity
- evolutionary algorithm
- dynamic programming
- training process
- matching algorithm
- synthetic data
- computationally efficient
- finite element method
- objective function
- classification process
- clustering method
- optimization algorithm
- model selection
- support vector machine
- computational cost
- experimental evaluation
- significant improvement
- pairwise
- preprocessing