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Fazhi Song
ORCID
Publication Activity (10 Years)
Years Active: 2017-2024
Publications (10 Years): 8
Top Topics
Iterative Learning
Error Reduction
Semiconductor Manufacturing
Biologically Plausible
Top Venues
IEEE Trans. Ind. Electron.
LSMS/ICSEE (2)
IEEE Trans. Circuits Syst. II Express Briefs
IEEE Trans. Neural Networks Learn. Syst.
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Publications
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Kai Zhang
,
Zhijian Hu
,
Fazhi Song
,
Xuefei Yang
,
Yang Liu
Consensus of Input Constrained Multi-Agent Systems by Dynamic Time-Varying Event-Triggered Strategy With a Designable Minimal Inter-Event Time.
IEEE Trans. Circuits Syst. II Express Briefs
71 (4) (2024)
Fazhi Song
,
Yang Liu
,
Dong Shen
,
Li Li
,
Jiubin Tan
Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation.
IEEE Trans. Ind. Electron.
69 (12) (2022)
Fazhi Song
,
Yang Liu
,
Wen Jin
,
Jiubin Tan
,
Wei He
Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach.
IEEE Trans. Neural Networks Learn. Syst.
33 (4) (2022)
Fazhi Song
,
Yang Liu
,
Xianli Wang
,
Wen Jin
,
Li Li
Enhancing Accuracy and Numerical Stability for Repetitive Time-Varying System Identification: An Iterative Learning Approach.
IEEE Access
8 (2020)
Fazhi Song
,
Yang Liu
,
Jianxin Xu
,
Xiaofeng Yang
,
Qiao Zhu
Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables.
IEEE Trans. Ind. Electron.
66 (4) (2019)
Fazhi Song
,
Yang Liu
,
Jun Cao
,
Li Li
,
Jiubin Tan
Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.
Complex.
2018 (2018)
Fazhi Song
,
Yang Liu
,
Jian-Xin Xu
,
Xiaofeng Yang
,
Ping He
,
Zhile Yang
Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay.
IEEE Trans. Ind. Electron.
65 (9) (2018)
Fazhi Song
,
Yang Liu
,
Zhile Yang
,
Xiaofeng Yang
,
Ping He
Iterative Learning Identification with Bias Compensation for Stochastic Linear Time-Varying Systems.
LSMS/ICSEE (2)
(2017)