Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage.
Fazhi SongYang LiuJun CaoLi LiJiubin TanPublished in: Complex. (2018)
Keyphrases
- experimental verification
- management system
- learning systems
- image processing
- building blocks
- neural network
- genetic algorithm
- artificial intelligence
- feature selection
- face recognition
- preprocessing
- real time
- complex systems
- retrieval systems
- preprocessing step
- massively parallel
- semiconductor manufacturing
- databases