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Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach.
Fazhi Song
Yang Liu
Wen Jin
Jiubin Tan
Wei He
Published in:
IEEE Trans. Neural Networks Learn. Syst. (2022)
Keyphrases
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data driven
feed forward
neural nets
learning algorithm
learning tasks
biologically plausible
learning process
back propagation
artificial neural networks
recurrent neural networks
error back propagation
neural network
reinforcement learning
feed forward neural networks
recurrent networks