Login / Signup
Chung-Sun Lee
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 0
Top Topics
Low Density
Thin Film
Plasma Etching
Chemical Reactions
Top Venues
3DIC
</>
Publications
</>
Soon-Wook Kim
,
Lan Peng
,
Andy Miller
,
Gerald Beyer
,
Eric Beyne
,
Chung-Sun Lee
Permanent wafer bonding in the low temperature by using various plasma enhanced chemical vapour deposition dielectrics.
3DIC
(2015)