Carlos Ramón Báez Álvarez

Publication Activity (10 Years)

Years Active: 2013-2017
Publications (10 Years): 3

Top Topics

Diffusion Filtering

Development Process

Top Venues

Publications

Carlos Ramón Báez Álvarez, Wilfrido Calleja Arriaga, Mónico Linares Aranda, Alfonso Torres-Jácome
Anisotropic silicon etch to house CMOS compatible MEMS microstructures without planarization techniques. CCE (2017)
Carlos Ramón Báez Álvarez, Mónico Linares Aranda, Alfonso Torres-Jácome, Wilfrido Calleja Arriaga
Test structures for residual stress monitoring in the integrated CMOS-MEMS process development. SMACD (2016)
Carlos Ramón Báez Álvarez, Mónico Linares Aranda, Alfonso Torres-Jácome, Wilfrido Calleja Arriaga, Javier de la Hidalga Wade
A set of test structures for the development of a CMOS-MEMS technology. CCE (2016)
Carlos Ramón Báez Álvarez, Mónico Linares Aranda, Wilfrido Calleja Arriaga, Joel Molina Reyes
Effect of changing the material and device's properties on the performance of polysilicon-based MicroActuators. CCE (2013)