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Test structures for residual stress monitoring in the integrated CMOS-MEMS process development.
Carlos Ramón Báez Álvarez
Mónico Linares Aranda
Alfonso Torres-Jácome
Wilfrido Calleja Arriaga
Published in:
SMACD (2016)
Keyphrases
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development process
case study
knowledge based systems
information technology
monitoring system
real time
data sets
artificial intelligence
low cost
information processing
design process
software testing
requirements engineering
feedback loop