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Design and optimisation of a high-temperature silicon micro-hotplate for nanoporous palladium pellistors.
Siu Man Lee
D. C. Dyer
J. W. Gardner
Published in:
Microelectron. J. (2003)
Keyphrases
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high temperature
design process
engineering design
genetic algorithm
case study
low cost
optimal design
information systems
evolutionary algorithm
software architecture
design decisions
high density
silicon dioxide