Investigation of carbon-silicon schottky diodes and their use as chemical sensors.
Georg S. DuesbergHye-Young KimKangho LeeNiall McEvoySinead WintersChanyoung YimPublished in: ESSDERC (2013)
Keyphrases
- high density
- semiconductor devices
- sensor networks
- thin film
- data center
- multi sensor
- sensor data
- data fusion
- real time
- carbon dioxide
- chemical vapor deposition
- plasma etching
- neural network
- chemical engineering
- sensor technology
- integrated circuit
- chemical compounds
- sensory data
- data acquisition
- control system
- three dimensional
- data sets