First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP.
Gayle MurdochM. O'TooleG. MartiA. PokhrelD. TsvetanovaS. DecosterS. KunduY. OnikiA. ThiamQ. T. LeO. Varela PedreiraAlicja LesniewskaG. Martinez-AlanisS. ParkZsolt TokeiPublished in: VLSI Technology and Circuits (2022)