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First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP.

Gayle MurdochM. O'TooleG. MartiA. PokhrelD. TsvetanovaS. DecosterS. KunduY. OnikiA. ThiamQ. T. LeO. Varela PedreiraAlicja LesniewskaG. Martinez-AlanisS. ParkZsolt Tokei
Published in: VLSI Technology and Circuits (2022)
Keyphrases
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