M. O'Toole

Publication Activity (10 Years)

Years Active: 2022-2022
Publications (10 Years): 1

Top Topics

Integrated Circuit

Top Venues

VLSI Technology and Circuits

Publications

Gayle Murdoch, M. O'Toole, G. Marti, A. Pokhrel, D. Tsvetanova, S. Decoster, S. Kundu, Y. Oniki, A. Thiam, Q. T. Le, O. Varela Pedreira, Alicja Lesniewska, G. Martinez-Alanis, S. Park, Zsolt Tokei
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP. VLSI Technology and Circuits (2022)