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An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films.

Shuo-Fu HsuMin-Hang WengRu-Yuan YangChun-Hsiung FangJyh-Horng Chou
Published in: IEEE Trans Autom. Sci. Eng. (2016)
Keyphrases
  • thin film
  • parameter optimization
  • chemical vapor deposition
  • plasma etching
  • neural network
  • film thickness
  • real time
  • feature extraction