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Shuo-Fu Hsu
Publication Activity (10 Years)
Years Active: 2016-2016
Publications (10 Years): 1
Top Topics
Chemical Vapor Deposition
Parameter Optimization
Film Thickness
Top Venues
IEEE Trans Autom. Sci. Eng.
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Publications
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Shuo-Fu Hsu
,
Min-Hang Weng
,
Ru-Yuan Yang
,
Chun-Hsiung Fang
,
Jyh-Horng Chou
An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films.
IEEE Trans Autom. Sci. Eng.
13 (4) (2016)