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Scaling of Trigate nanowire (NW) MOSFETs Down to 5 nm Width: 300 K transition to Single Electron Transistor, challenges and opportunities.

Veeresh DeshpandeSylvain BarraudXavier JehlRomain WacquezMaud VinetRemi CoquandB. RocheB. VoisinFrancois TriozonC. ViziozL. TostiBernard PrevitaliP. PerreauT. PoirouxMarc SanquerOlivier Faynot
Published in: ESSDERC (2012)
Keyphrases
  • lessons learned
  • data sets
  • real world
  • high speed
  • technical challenges
  • decision trees
  • key issues
  • electron beam
  • databases
  • neural network