Scaling of Trigate nanowire (NW) MOSFETs Down to 5 nm Width: 300 K transition to Single Electron Transistor, challenges and opportunities.
Veeresh DeshpandeSylvain BarraudXavier JehlRomain WacquezMaud VinetRemi CoquandB. RocheB. VoisinFrancois TriozonC. ViziozL. TostiBernard PrevitaliP. PerreauT. PoirouxMarc SanquerOlivier FaynotPublished in: ESSDERC (2012)