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Design and control of 6-DOF high-precision scan stage with gravity canceller.
Wataru Ohnishi
Hiroshi Fujimoto
Koichi Sakata
Kazuhiro Suzuki
Kazuaki Saiki
Published in:
ACC (2014)
Keyphrases
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high precision
high recall
high reliability
design procedure
achieve high precision
design process
case study
design decisions
computer aided
intelligent control
software architecture
mechanical systems
design methodology
design tools
controller design
real time control
building blocks
information systems