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Optimization of a Short-Range Proximity Effect Correction Algorithm in E-Beam Lithography Using GPGPUs.

Max SchneiderNikola BelicChristoph SambaleUlrich HofmannDietmar Fey
Published in: ICA3PP (1) (2012)
Keyphrases
  • short range
  • long range
  • wireless communication
  • wireless transmission
  • electron beam
  • electron beam lithography
  • prior knowledge
  • image compression
  • anomaly detection
  • mobile peer to peer networks