Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC-Co substrates.
Magdalena KadlecíkováMarian VojsJuraj BrezaMarián VeselýZdenek FrgalaMiroslav MichalkaJirina MatejkováAnna VojackováTibor DanisMarian MartonPublished in: Microelectron. J. (2007)