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12.2 A 7nm FinFET SRAM macro using EUV lithography for peripheral repair analysis.

Taejoong SongHoonki KimWoojin RimYongho KimSunghyun ParkChangnam ParkMinsun HongGiyong YangJeongho DoJinyoung LimSeungyoung LeeIngyum KimSanghoon BaekJonghoon JungDaewon HaHyungsoon JangTaejung LeeChul-Hong ParkBongjae KwonHyuntaek JungSungwee ChoYongjae ChooJaeseung Choi
Published in: ISSCC (2017)
Keyphrases
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