12.2 A 7nm FinFET SRAM macro using EUV lithography for peripheral repair analysis.
Taejoong SongHoonki KimWoojin RimYongho KimSunghyun ParkChangnam ParkMinsun HongGiyong YangJeongho DoJinyoung LimSeungyoung LeeIngyum KimSanghoon BaekJonghoon JungDaewon HaHyungsoon JangTaejung LeeChul-Hong ParkBongjae KwonHyuntaek JungSungwee ChoYongjae ChooJaeseung ChoiPublished in: ISSCC (2017)