Validation Experiments for LBM Simulations of Electron Beam Melting.

Regina Ammer Matthias Markl Vera Jüchter Carolin Körner Ulrich Rüde

Published in: CoRR (2014)

Keyphrases

electron beam
x ray
integrated circuit
design parameters
semiconductor devices
objective function
simulation models
numerical simulations
simulation model
electron beam lithography