Reliability and defectivity comparison of n- and p-channel SLS ELA polysilicon TFTs fabricated with a novel crystallization technique.
Despina C. MoschouM. A. ExarchosDimitrios N. KouvatsosGeorge J. PapaioannouAggeliki ArapoyanniApostolos T. VoutsasPublished in: Microelectron. Reliab. (2008)