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Simulating the dynamical friction force on ions due to a briefly co-propagating electron beam.

George I. BellDavid L. BruhwilerAlexei FedotovAndrey SobolRichard S. BusbyPeter StoltzDan T. AbellPeter MessmerIlan Ben-ZviVladimir Litvinenko
Published in: J. Comput. Phys. (2008)
Keyphrases
  • electron beam
  • x ray
  • integrated circuit
  • design parameters
  • semiconductor devices
  • genetic algorithm
  • optimal solution
  • contact force
  • rigid body
  • electron beam lithography