Progress on carbon nanotube BEOL interconnects.

B. Uhlig J. Liang J. Lee Raphael Ramos A. Dhavamani N. Nagy J. Dijon H. Okuno D. Kalita Vihar P. Georgiev A. Asenov Salvatore M. Amoroso Liping Wang Campbell Millar F. Konemann Bernd Gotsmann G. Goncalves B. Chen R. R. Pandey R. Chen Aida Todri-Sanial

Published in: DATE (2018)

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