Login / Signup
Precise Visual Inspection Algorithm for LSI Wafer Patterns Using Grayscale Image Comparison.
Yukio Matsuyama
Hisafumi Iwata
Hitoshi Kubota
Yasuo Nakagawa
Published in:
MVA (1988)
Keyphrases
</>
visual inspection
grayscale images
matching algorithm
computational complexity
preprocessing
feature selection
image processing
training data
gray scale