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A Percolative Approach to Reliability of Thin Film Interconnects and Ultra-thin Dielectrics.

C. PennettaLuca ReggianiG. TrefánR. CataldoG. De Nunzio
Published in: VLSI Design (2001)
Keyphrases
  • thin film
  • high density
  • short circuit
  • high speed
  • multi layer
  • solar cell
  • input output
  • grain size
  • databases
  • white light interferometry
  • database
  • room temperature
  • chemical vapor deposition