Statistical Models of Overdispersed Spatial Defects for Predicting the Yield of Integrated Circuits.

Tao Yuan Suk Joo Bae Yue Kuo

Published in: IEEE Trans. Reliab. (2020)

Keyphrases

statistical models
integrated circuit
statistical model
printed circuit boards
statistical modeling
parameter estimation
spatial data
spatial information
electron beam
statistical methods
probability models
least squares
defect detection
image sequences
exponential family