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Electron-Optic System With High Compression of a Multiple Elliptic Electron Beam for a Miniaturized THz-Band Vacuum Electron Device.
Igor A. Navrotsky
Nikita M. Ryskin
Published in:
IEEE Access (2022)
Keyphrases
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electron beam
semiconductor devices
x ray
integrated circuit
high compression
design parameters
data compression
electron beam lithography
multimedia
computational complexity
image compression