Chamber Matching of Semiconductor Manufacturing Process Using Statistical Analysis.
Tian-Hong PanDavid Shan-Hill WongShi-Shang JangPublished in: IEEE Trans. Syst. Man Cybern. Part C (2012)
Keyphrases
- manufacturing process
- statistical analysis
- process control
- quality control
- manufacturing systems
- control system
- product design
- discrete event
- printed circuit boards
- product quality
- surface roughness
- dynamical systems
- simulation model
- dynamic systems
- complex systems
- knowledge acquisition
- dynamic programming
- process planning
- computer vision