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Fabrication, characterisation and modelling of integrated on-silicon inductors.
Roberto S. Murphy-Arteaga
Jesus Huerta-Chua
Alejandro Díaz-Sánchez
Alfonso Torres-Jácome
Wilfrido Calleja Arriaga
M. Landa-Vázquez
Published in:
Microelectron. Reliab. (2003)
Keyphrases
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high density
high speed
plasma etching
semiconductor devices
low cost
data structure
multi agent systems
magnetic recording
silicon on insulator
database
machine learning
three dimensional
electron beam