TSV metrology and inspection challenges.

Ramakanth Alapati Youssef Travaly Jan Van Olmen Ricardo Cotrin Teixeira Jan Vaes Marc van Cauwenbergh Anne Jourdain Greet Verbinnen Gino Marcuccilli Glenn Florence Shay Wolfling Christine Pelissier Haiping Zhang Jaydeep Sinha Andreas Machura Irfan Malik

Published in: 3DIC (2009)

Keyphrases

camera calibration
lessons learned
open issues
single view
process control
quality control
key issues
computational challenges
database
application scenarios
data analysis
website
metadata
feature selection
information systems
machine learning
real world
data sets