Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.
Philipp ScholzNorbert HerfurthMichael SadowskiTed R. LundquistUwe KerstChristian BoitPublished in: Microelectron. Reliab. (2014)
Keyphrases
- single pass
- dynamic programming
- detection algorithm
- experimental evaluation
- learning algorithm
- computationally efficient
- high accuracy
- expectation maximization
- highly efficient
- optimization algorithm
- k means
- similarity measure
- three dimensional
- computational complexity
- neural network
- optimal solution
- times faster
- theoretical analysis
- segmentation algorithm
- roc curve
- linear programming
- high efficiency
- imaging systems
- recognition algorithm
- semiconductor manufacturing
- virtual environment
- particle swarm optimization
- np hard
- cost function
- search space
- video sequences
- image segmentation
- genetic algorithm