Flexible packed stencil design with multiple shaping apertures for e-beam lithography.

Chris Chu Wai-Kei Mak

Published in: ASP-DAC (2014)

Keyphrases

computer aided
user experience
electron beam
manufacturing cell
data sets
neural network
data mining
decision making
knowledge base
image processing
user interface
knowledge based systems
conceptual framework
engineering design
design decisions