Micromechanical accelerometers based on surface acoustic waves.

Dmitry Lukyanov Sergey Yu. Shevchenko Alexander Kukaev E. Filippova D. Safronov

Published in: NORCHIP (2014)

Keyphrases

wave propagation
three dimensional
surface reconstruction
free form
integrated circuit
surface features
source localization
neural network
object recognition
range data
surface model
surface points
underwater acoustic