Defect detection in patterned wafers using multichannel Scanning Electron Microscope.
Maria ZontakIsrael CohenPublished in: Signal Process. (2009)
Keyphrases
- defect detection
- scanning electron microscope
- integrated circuit
- feature extraction
- semiconductor manufacturing
- cross channel
- multi channel
- textured surfaces
- neural network
- automated visual inspection
- database
- electron beam
- vision system
- linear prediction
- single channel
- independent component analysis
- signal reconstruction
- multiscale
- three dimensional