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Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System.
George Cheroff
Frank F. Fang
Frederick Hochberg
Published in:
IBM J. Res. Dev. (1964)
Keyphrases
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si sio
metal oxide
x ray
simulated annealing
data structure
evolutionary algorithm
management system
multi dimensional
gate dielectrics