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Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System.

George CheroffFrank F. FangFrederick Hochberg
Published in: IBM J. Res. Dev. (1964)
Keyphrases
  • si sio
  • metal oxide
  • x ray
  • simulated annealing
  • data structure
  • evolutionary algorithm
  • management system
  • multi dimensional
  • gate dielectrics