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A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C
Raquel Hellin-Rico
Jean Pierre Celis
Kris Baert
Chris Van Hoof
Ann Witvrouw
Published in:
CoRR (2007)
Keyphrases
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three dimensional
high density
low energy electron
surface model
domain specific
d objects
high speed
vector field
single image
surface reconstruction
object surface
shape recovery
surface points
surface geometry
surface features
shape index
space charge
database