Electron Beam Prober for LSI Testing with 100ps Time Resolution.

Y. Goto K. Ozaki T. Ishizuka A. Ito Y. Furukawa T. Inagaki

Published in: ITC (1984)

Keyphrases

electron beam
latent semantic indexing
x ray
integrated circuit
semiconductor devices
design parameters
test cases
vector space
expert systems
artificial intelligence
three dimensional
similarity measure