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Analysis of electromigration-induced backflow stresses in Cu(Mn) interconnects using high statistical sampling.

M. KraatzChristoph SanderAndré ClausnerM. HauschildtYvonne StandkeMartin GallEhrenfried Zschech
Published in: IRPS (2018)
Keyphrases
  • statistical analysis
  • wide range
  • information retrieval
  • learning algorithm
  • data sets
  • information systems
  • multiscale
  • quantitative analysis