Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS.
Ying-Lin ChenJacob DeforceVic De RidderBappaditya DeyVíctor BlancoSandip HalderPhilippe LerayPublished in: CoRR (2024)
Keyphrases
- defect detection
- wide range
- automated visual inspection
- multiscale
- text classification
- text categorization
- improved algorithm
- neural network
- artificial intelligence
- search engine
- case study
- database systems
- genetic algorithm
- multi agent
- information retrieval
- high precision
- high efficiency
- semiconductor manufacturing
- achieving high
- databases