Spatial Attention Enhanced Wafer Defect Classification Algorithm for Tiny Defects.
Can MaLuyang JieYiming YaoTong XuLilei HuPublished in: ICAIT (2023)
Keyphrases
- classification algorithm
- defect detection
- knn
- k nearest neighbor
- document classification
- class labels
- automated visual inspection
- naive bayes
- spatial information
- support vector machine
- classification method
- hierarchical classification
- learning algorithm
- training phase
- classification rules
- training set
- spatial data
- integrated circuit
- clustering algorithm
- concept drift
- accurate classification
- surface defects
- text classification
- natural language processing
- semiconductor manufacturing
- data sets